IHP GmbH Leibniz Institut F R Innovative Mikroelektronik Tender

1. 200 Mm Manual Probe System For 4-port Measurements Up To 67 Ghz - Probe Station With Puck-controlled Air-bearing Stage And Large Probe Platen For Magnetic Or Vacuum-based Micro-positioners. - Xy Total Stage Movement: 240 X 315 Mm. - Fine Stage Movement (via Large Rotary Knobs): 25 X 25 Mm. - Fine Chuck Theta Rotation: +/- 5 Degrees. - Dedicated Platen Height Adjustment: 20 Mm. - Platen Lift With Discrete Contact, Separation (300 ?m), And Loading (3 Mm) Positions For Ease Of Use, With A Safety Lock Function At The Loading Position. - Probe Hover Control (phc) For Convenient Alignment Of Probes To The Pads During Higher Magnification, With Adjustable Depth Of Field (dof) At 50, 100, Or 150 ?m. - Safe Contact: Locking Mechanism For The Xy Air-bearing Stage At Contact To Prevent Accidental Movements, With Led Visual Warning. - Stable Microscope Bridge Mount With Embedded Platforms For Accessories. - Vibration-absorbing Base For Stability. - Integrated Vacuum System For Main And Auxiliary Chucks (if Available) And Illumination (coaxial And/or Ring) Controls At The Front. - Integrated Service Loop For Stable Xy Stage Movement