IHP GmbH Leibniz Institut F R Innovative Mikroelektronik Tender

4-point-resistivity Measurement System Including: - State-of-the-art Laptop Equipped With State-of-the-art Software For Accurate 4-point-measuring Control With Licenses & Updates For At Least The Next 5 Years. The Laptop Must Be Fully Capable To Run The Control Software Using As Operating System Windows 10 Or Higher. The Specified System Accuracy Needs To Be Better Than 99 %. The Software Has To Manage Tests Automatically, Displays Results Graphically (average, Standard Deviation) And Enable Export Of The Data (excl Files). - Probe Stand Including An Ultem Vacuum Chuck For 200 Mm Wafer And A Manual X-y Motion Control Stage With Digital Positioning Readout. The Probe Stand Has To Be Pre-wired And Ready To Connect To The Source Meter. - Probe Head Including 2 Different Four-point Probes: - Tungsten Carbide As Probe Tip Material - 85 G Pressure On Each Tip 1) 0.0625 Inch Tip Spacing With 0.005 Inch Tip Radius 2) 0.040 Inch Tip Spacing With 0.0016 Inch Tip Radius - Source Meter - Resistivity Range: 10 Μ?/sq - 100 M?/sq - Voltage Range: 20 Mv - 200 V - Current Range: 10 Na - 1 A - 6½ Digits - Graphical Display - Necessary State-of-the-art Cable Connections Between All The System Components To Guarantee Accurate Operation With Deviations Of Results Less Than 1 %. Resistance Calibration Standard - 200 Mm Bare Silicon Wafer (lapped, Polished) - P-type (boron) Doped - 710 Μm Thickness - 10 Ohm.cm, 141 Ohm/sq - Certificates Of Calibration (resistivity, Sheet Resistance And Thickness) On-site Installation And Training - The Tool Installation At Ihp Must Include An One-day User Training At Ihp In-person. - The Technical & Process Acceptance Test At Ihp Must Contain Measuring The Resistivity And Sheet Resistance Of The Calibration Wafer Of Position 2 And One Ihp Standard Wafer Having A Resistivity Of 8-12 Ohm.cm With A Deviation Of < 1 %. General Requirements - Delivery: Incoterms 2010 Ddp Or Dap - If Delivery Is From Outside Eu, The Supplier Is Importer - Electrical Connection Requirements Ihp: 230/400vac 50hz Tn-s Net (3xl+n+pe), Enabling Access To Eu/german Power Grid - System Must Be Ce Compliant And Marked With The Ce Certification Sign - System Must Fulfill The Actual "machinery, And Amending Directive" (eg-maschinenrichtlinie) - Directive 2014/30/eu Emv Must Be Fulfilled - Components From Position 1 And 2 Must Be Straight From The Factory, Not Pre-owned Or Refurbished - Minimum 1 Year Warranty - Measurement System Including All Parts Of Position 1 Shall Not Exceed The Maximum Dimension Of 80 Cm X 120 Cm - Components Packaged In Cartons Must Be Smaller Than 90 Cm As Longest Side - Manuals (most Important Operation & Safety Manuals) Must Be Available In German Language And In Electronic Form