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SPECIFICATIONS FOR SMPS TYPE, COMPACT, SPUTTER ION PUMP, HIGH VOLTAGE POWER SUPPLY QUANTITY : 4 NOS. S/N PARAMETER SPECIFICATIONS [1] GENERAL Compact SMPS type, Digital, High Voltage Power Supply with low leakage current for Sputter Ion Pumps with Digital Display and Remote Monitoring facilities. [2] OUTPUT VOLTAGE AND POLARITY VOLTAGE VALUES Voltage selectable by 3-position Band Switch on Front Panel as given below. Polarity change by flipping polarity card inside power supply. 1) +/- 3.5 kV (No load / Open Circuit Condition) 2) +/- 5.5 kV (No load / Open Circuit Condition) 3) +/- 7.0 kV (No load / Open Circuit Condition) [3] OUTPUT CURRENT 500 mA under Short Circuit conditions. Note : The Power supply should provide the current continuously and not trip for atleast 15 minutes. [4] TYPE OF POWER/SUPPLY Switched Mode Power Supply. [5] DISPLAY Multi-line TFT LCD Display with Touch Control or 3 Line Bright LED Display. The following parameters should be displayed simultaneously : a) Voltage : 0 – 10 kV Full Scale b) Current : 0 – 500 mA AutoRanging c) Pressure : 10E-4 to 10E-10 Torr / mbar / Pascal [6] FRONT PANEL CONTROL 1) Reset Control (For Resetting the unit ) 2) H V On/Off (For Switching On/Of High Voltage) 3) Relay Set (For Setting Relay at specific pressure) 4) Trip Set (For Setting Over Pressure Trip Point) 5) Timer Set (For Setting Timer at high pressure operation) [7] PROTECTION a) Overpressure Trip set at 1 X 10E-3 Torr. b) 30 Min Timer Based Trip set at 1 X 10E-4 Torr [8] INPUT POWER 230 VAC ± 10%, 50Hz, Single Phase, with Mains Cable. [9] TRIP INTERLOCK A potential free contact preset to 5 X 10E-5 Torr, Rating 230V, 1 A [10] H. V. OUTPUT HB11 type 10 kV High Voltage Panel Mount Connectors on back panel with separate Ground connector. [11] OUTPUT CABLE Shielded 10 kV Silicone insulated flexible HV cable, 3 meters long, with HS11 type mating connector on one end and other side SHV (7kV) connector. [12] REMOTE MONITORING Using Modbus RTU protocol (RS 232) for all the displayed parameters [13] MECHANICAL 6" (Width) x 6" (Breadth) x 14" (Length) (Approx.) [14] FINISH Self anodized (except front) [15] TESTING, DEMONSTRATION & ACCEPTANCE a) The supplier shall provide a compliance certificate for all the above mentioned parameters and demonstrate all of the above parameters prior to delivery of the materials b) User Manuals with complete circuit diagrams and part list should be provided for trouble shooting purposes

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